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FMA-LP2609A-I_FMA-LP2610A-I_FMA-LP2611A-I_FMA-LP2612A-I質量流量控制器OMEGA

130 + Gas Calibration, including Pure Gas and Mixed Gas

Display pressure, temperature and mass flow at the same time

Keyboard interface is easy to operate

NIST Traceability Standard

Full range of 0.5 SCCM~500 SLM

Typical response time is 50-100 ms

Adjustment ratio is 200:1

Location insensitivity

Accuracy of (+0.8%) readings

RS232 standard

Customized Real-time Gas Mixing Programming

Up to 20 user-defined gas mixtures can be stored

FMA-LP2600A series mass flow controllers use differential pressure principle to detect and control mass flow in laminar flow field. The laminar flow element (LFE) in the flowmeter forces the gas to enter the laminar flow state (after rectification). According to Poiseuille equation, there is a linear relationship between volume flow and pressure drop in this region. The differential pressure sensor is used to measure the pressure drop of LFE at fixed distance. At the same time, the volume flow rate can be accurately determined according to the gas viscosity. A separate absolute temperature and pressure sensor is introduced, and the gas flow rate is corrected according to a series of standard conditions. This standardized flow is usually referred to as mass flow, expressed in units such as standard cubic centimeter/minute (SCCM) or standard liter/minute (SLM).

FMA-LP2609A-I_FMA-LP2610A-I_FMA-LP2611A-I_FMA-LP2612A-I質量流量控制器OMEGA

130+氣體校準，包括純氣體和混合氣體

同時顯示壓力、溫度和質量流量

按鍵界面操作簡單

NIST可追溯性標準

0.5 SCCM~500 SLM滿量程范圍

典型響應時間為50~100 ms

調節比為200：1

位置不敏感

±0.8%讀數精度

RS232標準

自定義實時氣體混合編程

最多可存儲20種用戶定義的氣體混合物

FMA-LP2609A-I_FMA-LP2610A-I_FMA-LP2611A-I_FMA-LP2612A-I質量流量控制器OMEGA

控制器使用真正的比例閥聯接到 流體，以便使用積分式 PID回路控制器來控制流量。標準設備包括 0 ~ 5V輸出（可選4 ~ 20 mA）和RS232 通信。可從前端鍵盤或 通過RS232通信調整氣體 選擇功能和設定值。體積流量、質量 流量、絕對壓力以及溫度均可 通過RS232連接查看或記錄。 在距離為46m（150’）的同***串口連接上，同時***多可與26臺設備進行多點通信。