AFMinSEM 德*** Nano analytik（ParcanNano)針尖電子束光刻與掃描電子顯微鏡組合系統(tǒng)
簡(jiǎn)介：
公司以全球獨(dú)***的針尖技術(shù)為核心競(jìng)爭(zhēng)力，技術(shù)源自于德***伊爾默瑙工業(yè)大學(xué)，致力于主動(dòng)式針尖技術(shù)在微納米結(jié)構(gòu)制備和表征方面的研發(fā)，及其相關(guān)設(shè)備的產(chǎn)業(yè)化。
公司開(kāi)發(fā)的針尖技術(shù)模塊為滿足高精度成像而空間受限的應(yīng)用需求而設(shè)計(jì)，既可以在大氣環(huán)境下實(shí)現(xiàn)樣品快速表征，也可以集成在真空環(huán)境中，如集成在掃描電子顯微鏡（SEM）中。無(wú)需對(duì)SEM腔室進(jìn)行任何改造，保留SEM原有功能，賦予嶄新的應(yīng)用領(lǐng)域，例如進(jìn)行原位形貌表征、微操作和針尖誘導(dǎo)沉積。
技術(shù)特點(diǎn)：
。 不影響掃描電鏡自身功能
。4mm電鏡工作距離確保高分辨
。 原子力、電子束及離子束功能聯(lián)用
。 標(biāo)準(zhǔn)數(shù)據(jù)法蘭接口，方便安裝
。 大氣、真空環(huán)境操作
。 體積小，重量輕，靈活
。 樣品可掃范圍大 20 x 20 mm
。 自激發(fā)自傳感智能針尖規(guī)
功能指標(biāo)：
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Brief introduction:
The company takes the world＇s exclusive patented tip technology as its core competitiveness. The technology is derived from the technical university of ilmenau, Germany, ａnd is committed to the research ａnd development of active tip technology in the preparation ａnd characterization of micro ａnd nano structures, as well as the industrialization of related equipment.
The pinhead technology module developed by the company is designed to meet the application requirements of high-precision imaging with limited space. It can not only realize rapid sample characterization in atmospheric environment, but also be integrated in vacuum environment, such as scanning electron microscope (SEM).No modification of SEM chamber is required, ａnd the original functions of SEM are retained, ａnd new application fields are endowed, such as in-situ morphology characterization, micromanipulation ａnd needle-induced deposition.
Technical features:
.The function of sem itself was not affected
.The working distance of 4mm electron microscope ensures high resolution
.Functional combination of atomic force, electron beam ａnd ion beam
.Standard data flange interface for easy installation
.Operating in atmosphere ａnd vacuum
.Small size, light weight, flexible
.The sweep range of the sample is 20 x 20 mm
.Self-excitation ａnd self-sensing intelligent needle gauge
滬公網(wǎng)安備31011502016460號(hào)
